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Vibration-damping linear active isolation table 'e-Stable'

Supporting productivity improvement in semiconductor manufacturing and inspection equipment! Controlling position during load transfer.

The "e-Stable" is an active vibration isolation table available in two types: linear motor control and pneumatic control. The vibration-damping linear active isolation table newly developed by Kurashiki Kako pursues the advantages of both types. Please feel free to contact us when you need assistance. 【Features】 ■ Achieves vibration-damping performance that greatly exceeds that of the pneumatic control type ■ Significantly improves productivity ■ Equipped with motion feedforward control ■ Allows for more accurate position control by inputting stage movement information in advance ■ Maximizes the performance of high-resolution devices ■ Consumes very little air *For more details, please download the PDF or feel free to contact us.